
Helium-Ion Beam Systems for Thin Magnetic Films
Spin-Ion Technologies Helium-S
Spin-Ion Technology offers ultra-compact Helium-ion beam process technology to enhance the magnetic properties of thin films at the atomic scale. For more than 20 years, Spin-Ion’s research team has been developing a patented process solution to treat magnetic materials to enhance their performance, reducing manufacturing costs and improving yield for both HDD and MRAM applications. This process is based on post-growth He+ ion irradiation to tailor the magnetic properties of thin magnetic films at the atomic scale and improve their performances. The utilization of light ions provides the precise control of inter-atomic displacements through the low energy transfer. The key feature of the technology is the precise control of magnetic properties including: perpendicular magnetic anisotropy, ferromagnetic order, damping, Dzyaloshinskii-Moriya Interaction, and domain wall/skyrmions dynamics or SOT switching. Spin-Ion's technology has been developed to deliver dedicated tools to customers working in nano-magnetism and spintronics.
Features
- He+ ions with energies ranging from 1.0 to 30 KeV
- Electron Cyclotron Resonance (ECR) Ion Source
- Ultra-compact/small foot-print
- Standalone (ex-situ) system or integrated (in-situ) with UHV process equipment (sputtering, tube, etc.)
- Beam currents from a few microamperes up to several milliamperes
- 1 inch coupon sample capability
- Hardware and software for remote control